Contract notice

Directive 2014/24/EU

Section I: Contracting authority

I.1)

Name and addresses

Education Procurement Service (EPS)

IE 6609370 G

University of Limerick

Castletroy

Co.Limerick

Contact person: Eimear Brennan

Telephone: +353 61234901

E-mail: eimear.brennan@ul.ie

Internet address(es):

Main address: http://www.educationprocurementservice.ie

Address of the buyer profile: https://irl.eu-supply.com/ctm/Company/CompanyInformation/Index/87073

I.3)

Communication

The procurement documents are available for unrestricted and full direct access, free of charge, at:

http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=153719&B=ETENDERS_SIMPLE

Additional information can be obtained from

the abovementioned address:

Tenders or requests to participate must be submitted

electronically via: http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=153719&B=ETENDERS_SIMPLE

Tenders or requests to participate must be submitted

to the abovementioned address

I.4)

Type of the contracting authority

Body governed by public law

I.5)

Main activity

Education

Section II: Object

II.1)

Scope of the procurement

II.1.1)

Title

UCC - RFT a Plasma Chemical Vapour Deposition System for Compound Semiconductors for the Tyndall National Institute

Reference number: LEE701C

II.1.2)

Main CPV code

38000000 - Laboratory, optical and precision equipments (excl. glasses)

II.1.3)

Type of contract

Supplies

II.1.4)

Short description

Tenders are sought for the supply, delivery and installation of a Plasma Chemical Vapour Deposition System for Compound Semiconductors for the Tyndall National Institute, UCC.

II.1.5)

Estimated total value

Value excluding VAT: 750000.00 EUR

II.1.6)

Information about lots

This contract is divided into lots: no

II.2)

Description

II.2.2)

Additional CPV code(s)

31712330 - Semiconductors

38410000 - Metering instruments

38420000 - Instruments for measuring flow, level and pressure of liquids and gases

38430000 - Detection and analysis apparatus

38432000 - Analysis apparatus

38653300 - Apparatus and equipment for developing film

38654000 - Microfilm and microfiche equipment

38654100 - Microfilm equipment

II.2.4)

Description of the procurement

Tenders are sought for the supply, delivery and installation of a Plasma Chemical Vapour Deposition System for Compound Semiconductors for the Tyndall National Institute, UCC.
The Process & Product Development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional Silicon microelectronics and Silicon MEMS to III-V photonic devices. We wish to extend our capability in the area of plasma deposition by purchasing a fully functional load locked PECVD (Plasma Enhanced Chemical Vapour Deposition) or ICPCVD (Inductively Coupled Plasma Chemical Vapour Deposition) system including pumps which will allow us to move our processing to a higher TRL level in terms of substrate size, deposition processes and control. The system offered must be suitable for use in a class 1000 cleanroom. As much of the work is in the area of Semiconductor R&D we have a requirement for a system that can handle substrates of varying sizes from 10 x 10 mm and various irregular shaped pieces through to 200mm wafers, including 50mm, 100mm and 150mm wafers. Due to the novel nature of the R&D and customer base we also require that the system be able to deposit a variety of film materials from dielectrics SiO2 (silicon dioxide), Si3N4 (silicon nitride) and SiOxNy (silicon oxynitride) to amorphous Silicon and SiC (silicon carbide). We have defined the technical specification in terms of these specific film materials and also for the use of TEOS (Tetraethylorthosilicate) liquid precursor for conformal SiO2 deposition and the specific requirement for low temperature deposition of SiO2 and Si3N4 as well as these materials at the more standard deposition temperature of 300C. The tenderer should also supply as part of the tender response details of the recipes to be used for cleaning when changing between deposition materials. The tender response must clearly show the costs for all items and any additional options must be clearly identified as such and costed separately. As part of

II.2.5)

Award criteria

Price is not the only award criterion and all criteria are stated only in the procurement documents

II.2.6)

Estimated value

Value excluding VAT: 750000.00 EUR

II.2.7)

Duration of the contract, framework agreement or dynamic purchasing system

Duration in months: 12

This contract is subject to renewal: no

II.2.10)

Information about variants

Variants will be accepted: no

II.2.11)

Information about options

Options: no

II.2.13)

Information about European Union funds

The procurement is related to a project and/or programme financed by European Union funds: no

II.2.14)

Additional information

All information relating to tenders is published on www.etenders.gov.ie only

Section III: Legal, economic, financial and technical information

III.1)

Conditions for participation

III.1.1)

Suitability to pursue the professional activity, including requirements relating to enrolment on professional or trade registers

List and brief description of conditions: Please see RFT document for further details.

III.1.2)