Education Procurement Service (EPS)

IE 6609370 G

University of Limerick, Plassey

Limerick

Co.Limerick

IE

Contact person: Philip Gurnett

Telephone: +353 061213488

E-mail: Philip.gurnett@ul.ie

Main address: http://www.ul.ie/edps

Address of the buyer profile: https://irl.eu-supply.com/ctm/Company/CompanyInformation/Index/87073

The procurement documents are available for unrestricted and full direct access, free of charge, at:  

Additional information can be obtained from

the abovementioned address:  

Tenders or requests to participate must be submitted

electronically via:  http://irl.eu-supply.com/app/rfq/rwlentrance_s.asp?PID=99804&B=ETENDERS_SIMPLE

Tenders or requests to participate must be submitted

to the abovementioned address

Body governed by public law

Education

Sputter Desposition Tool for Trinity College Dublin

Reference number:  LEE091C

CRANN, TCD is seeking to procure a state-of-the-art sputter deposition tool - ‘Trifolium Dubium’ for the development of materials and thin film devices. Magnetic tunnel junctions and Heusler alloys are expected to be a major component of the research conducted using this system, as well as blanket films and stacks of novel multiferroics, magnetic and/or transparent oxides. The system will be the core of a national access facility and will be available for use by a large number of research groups in both academia and industry, and as such performance and flexibility are paramount.
The requirement will be divided into three (3) Lots. It would be envisaged that the three (3) lots will be broken down as follows:
Lot 1: Sputter Chamber #1
Lot 2: XPS Chamber
Lot 3: Water Transfer System Arrangement & Vacuum

Tenders may be submitted for  all lots

Maximum number of lots that may be awarded to one tenderer:  3

Sputter Chamber 1 - Desposition System

Lot No:  1

Main site or place of performance:  

The base tool would be split into two chambers connected via a vacuum transfer system. The tool would be a fully integrated system, with all chambers interconnected under vacuum with wafer transfer between chambers for subsequent processing steps. The tool should be capable of co-deposition of various materials with low roughness and good uniformity across 4” (100 mm) diameter substrates, including at high temperatures. One chamber would be used primarily for deposition of metals, while the other would be designed for deposition of oxides and nitrides, including reactive processes involving the introduction of oxygen and/or nitrogen into the chamber.
Additional deposition chambers such as for pulsed laser deposition (PLD) and molecular beam epitaxy (MBE) are considered, as well. These are to be fully integrated into the vacuum transfer system above. As such, a suitable Nd:YAG laser is potentially required for PLD. Finally, in an attempt to improve the in-situ characterisation capabilities, a dedicated, wafer compatible X-ray photoelectron spectroscopy (XPS) analytics chamber is also considered.

This contract is subject to renewal: no

Objective criteria for choosing the limited number of candidates:

Identification of the project: SFI-Funding Contribution

Sputter Disposition Tool for TCD required. See PQQ for details.

Photelectron Spectroscopy Analysis Chamber

Lot No:  2

Main site or place of performance:  

The base tool would be split into two chambers connected via a vacuum transfer system. The tool would be a fully integrated system, with all chambers interconnected under vacuum with wafer transfer between chambers for subsequent processing steps. The tool should be capable of co-deposition of various materials with low roughness and good uniformity across 4” (100 mm) diameter substrates, including at high temperatures. One chamber would be used primarily for deposition of metals, while the other would be designed for deposition of oxides and nitrides, including reactive processes involving the introduction of oxygen and/or nitrogen into the chamber.
Additional deposition chambers such as for pulsed laser deposition (PLD) and molecular beam epitaxy (MBE) are considered, as well. These are to be fully integrated into the vacuum transfer system above. As such, a suitable Nd:YAG laser is potentially required for PLD. Finally, in an attempt to improve the in-situ characterisation capabilities, a dedicated, wafer compatible X-ray photoelectron spectroscopy (XPS) analytics chamber is also considered.

This contract is subject to renewal: no

Objective criteria for choosing the limited number of candidates:

Identification of the project: SFI-Funding Contribution

Sputter Disposition Tool for TCD required. See PQQ for details.

PLD Laser & Optics

Lot No:  3

Main site or place of performance:  

The base tool would be split into two chambers connected via a vacuum transfer system. The tool would be a fully integrated system, with all chambers interconnected under vacuum with wafer transfer between chambers for subsequent processing steps. The tool should be capable of co-deposition of various materials with low roughness and good uniformity across 4” (100 mm) diameter substrates, including at high temperatures. One chamber would be used primarily for deposition of metals, while the other would be designed for deposition of oxides and nitrides, including reactive processes involving the introduction of oxygen and/or nitrogen into the chamber.
Additional deposition chambers such as for pulsed laser deposition (PLD) and molecular beam epitaxy (MBE) are considered, as well. These are to be fully integrated into the vacuum transfer system above. As such, a suitable Nd:YAG laser is potentially required for PLD. Finally, in an attempt to improve the in-situ characterisation capabilities, a dedicated, wafer compatible X-ray photoelectron spectroscopy (XPS) analytics chamber is also considered.

This contract is subject to renewal: no

Objective criteria for choosing the limited number of candidates:

Identification of the project: SFI-Funding Contribution

Sputter Disposition Tool for TCD required. See PQQ for details.

List and brief description of conditions:  See LEE091C PQQ document for details

List and brief description of selection criteria:  

Minimum level(s) of standards possibly required:  

List and brief description of selection criteria:  

Minimum level(s) of standards possibly required:  

Date:  13/07/2016

Local time:  14:00

Duration in months : 36  (from the date stated for receipt of tender)

Central Office of the High Court

Four Courts, Inns Quay

Dublin

7

IE