Date of dispatch of this notice: 29/04/2016
External Reference: 2016-505986
TED Reference: 2016/S 086-152402
Date of dispatch of this notice: 29/04/2016
External Reference: 2016-505986
TED Reference: 2016/S 086-152402
Provision of XeF2 Etch System.
Cork
UCC is seeking expressions of interest for the provision of plasma etch system
which is specific to realising anisotropic etching of silicon/polysiicon/germanium
using XeF2 based chemistry.
UCC/2015/43
Etch system
May be part funded by European regional development funds