Date of dispatch of this notice: 26/11/2015
Expire date: 07/12/2015
External Reference: 2015-322051
TED Reference: 2015/S 231-419464
Date of dispatch of this notice: 26/11/2015
Expire date: 07/12/2015
External Reference: 2015-322051
TED Reference: 2015/S 231-419464
Provision of XeF2 Etch System.
Cork
UCC is seeking expressions of interest for the provision of plasma etch system
which is specific to realising anisotropic etching of silicon/polysiicon/germanium
using XeF2 based chemistry.
One
Late receipt of funding to be committed by end of 2015.
UCC/2015/43
May be part funded by European regional development funds