UCC/2015/43 - XeF2 Etch system
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Detailed description:
UCC is seeking expressions of interest for the provision of plasma etch system which is specific to realising anisotropic etching of silicon/polysiicon/germanium using XeF2 based chemistry.
Type of contract:
Supplies
Response deadline (Irish time):
07/12/2015 15:30:00
CPV codes:
39300000-5 Miscellaneous equipment
Contracting authority:
University College Cork ( UCC )
6 Elderwood
College Rd
Cork
Ireland
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Contact:
Fiona Thomson
http://www.ucc.ie
Published notices
| Notice | Date of dispatch |
|---|---|
| Contract Notice (eTenders) | 26/11/2015 16:10 |
| Contract notice (TED (v208)) | 26/11/2015 15:40 |
| Contract Award Notice (eTenders) | 29/04/2016 16:30 |
| Contract award notice (TED (v208)) | 29/04/2016 16:10 |
Lots
Etch system